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Fabrication and Characterization of a High-Performance Multi-Annular Backscattered Electron Detector for Desktop SEM †
Scanning electron microscopy has been developed for topographic analysis at the nanometer scale. Herein, we present a silicon p-n diode with multi-annular configuration to detect backscattering electrons (BSE) in a homemade desktop scanning electron microscope (SEM). The multi-annular configuration...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2018
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6163608/ https://www.ncbi.nlm.nih.gov/pubmed/30223459 http://dx.doi.org/10.3390/s18093093 |