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Pattern generation for direct-write three-dimensional nanoscale structures via focused electron beam induced deposition

Fabrication of three-dimensional (3D) nanoarchitectures by focused electron beam induced deposition (FEBID) has matured to a level that highly complex and functional deposits are becoming available for nanomagnetics and plasmonics. However, the generation of suitable pattern files that control the e...

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Detalles Bibliográficos
Autores principales:	Keller, Lukas, Huth, Michael
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Beilstein-Institut 2018
Materias:	Full Research Paper
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6176821/ https://www.ncbi.nlm.nih.gov/pubmed/30345218 http://dx.doi.org/10.3762/bjnano.9.240

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