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Static and Dynamic Mechanical Behaviors of Electrostatic MEMS Resonator with Surface Processing Error

The micro-electro-mechanical system (MEMS) resonator developed based on surface processing technology usually changes the section shape either due to excessive etching or insufficient etching. In this paper, a section parameter is proposed to describe the microbeam changes in the upper and lower sec...

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Detalles Bibliográficos
Autores principales:	Feng, Jingjing, Liu, Cheng, Zhang, Wei, Hao, Shuying
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2018
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187238/ https://www.ncbi.nlm.nih.gov/pubmed/30393310 http://dx.doi.org/10.3390/mi9010034

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