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Statistical Investigation of the Mechanical and Geometrical Properties of Polysilicon Films through On-Chip Tests
In this work, we provide a numerical/experimental investigation of the micromechanics-induced scattered response of a polysilicon on-chip MEMS testing device, whose moving structure is constituted by a slender cantilever supporting a massive perforated plate. The geometry of the cantilever was speci...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2018
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187481/ https://www.ncbi.nlm.nih.gov/pubmed/30393329 http://dx.doi.org/10.3390/mi9020053 |