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SF(6) Optimized O(2) Plasma Etching of Parylene C

Parylene C is a widely used polymer material in microfabrication because of its excellent properties such as chemical inertness, biocompatibility and flexibility. It has been commonly adopted as a structural material for a variety of microfluidics and bio-MEMS (micro-electro-mechanical system) appli...

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Detalles Bibliográficos
Autores principales:	Zhang, Lingqian, Liu, Yaoping, Li, Zhihong, Wang, Wei
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2018
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187533/ https://www.ncbi.nlm.nih.gov/pubmed/30424096 http://dx.doi.org/10.3390/mi9040162

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