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Fabrication and Characterization of PZT Fibered-Epitaxial Thin Film on Si for Piezoelectric Micromachined Ultrasound Transducer

This paper presents a fibered-epitaxial lead zirconate titanate (PZT) thin film with intermediate features between the monocrystalline and polycrystalline thin films for piezoelectric micromachined ultrasound transducer (pMUT). The grain boundaries confirmed by scanning electron microscopy, but it s...

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Detalles Bibliográficos
Autores principales:	Ngoc Thao, Pham, Yoshida, Shinya, Tanaka, Shuji
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2018
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187569/ https://www.ncbi.nlm.nih.gov/pubmed/30424388 http://dx.doi.org/10.3390/mi9090455

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