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Micro Magnetic Field Sensors Manufactured Using a Standard 0.18-μm CMOS Process

Micro magnetic field (MMF) sensors developed employing complementary metal oxide semiconductor (CMOS) technology are investigated. The MMF sensors, which are a three-axis sensing type, include a magnetotransistor and four Hall elements. The magnetotransistor is utilized to detect the magnetic field...

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Detalles Bibliográficos
Autores principales: Lin, Yen-Nan, Dai, Ching-Liang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187693/
https://www.ncbi.nlm.nih.gov/pubmed/30424326
http://dx.doi.org/10.3390/mi9080393