Cargando…
Analysis and Design of a Polygonal Oblique Beam for the Butterfly Vibratory Gyroscope with Improved Robustness to Fabrication Imperfections
This paper focuses on structural optimization of a Butterfly vibratory gyroscope (BFVG). An oblique suspension beam adopting polygonal cross-section is proposed in order to enhance the sensitivity and robustness. The operation principles of the BFVG are introduced. The suspension beam, which was fou...
Autores principales: | , , , |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2018
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187702/ https://www.ncbi.nlm.nih.gov/pubmed/30424131 http://dx.doi.org/10.3390/mi9050198 |
_version_ | 1783363075073638400 |
---|---|
author | Ou, Fenlan Hou, Zhanqiang Wu, Xuezhong Xiao, Dingbang |
author_facet | Ou, Fenlan Hou, Zhanqiang Wu, Xuezhong Xiao, Dingbang |
author_sort | Ou, Fenlan |
collection | PubMed |
description | This paper focuses on structural optimization of a Butterfly vibratory gyroscope (BFVG). An oblique suspension beam adopting polygonal cross-section is proposed in order to enhance the sensitivity and robustness. The operation principles of the BFVG are introduced. The suspension beam, which was found to be the key component, is selectively stressed. Varying cross sections of the suspension beam, including parallelogram, pentagon, hexagon, platform of pentagon, L-shaped and convex shapes are compared with each other. In particular, in order to show the advantages of the proposed polygonal cross-section, the convex cross-section is used as a reference. The influence of fabrication imperfections, which includes alignment error, silicon thickness error, etching depth error, upper width error, bottom width error and deep reactive-ion etching (DRIE) verticality error, on the oblique beam’s spindle azimuth angle of the two cross-sections is analyzed. Further, the quadrature error of two cross-sections with a fabrication defect is analyzed. The theoretical arithmetic results suggest that a polygonal cross-section beam is much more stable than a convex cross-section beam in most cases. The robustness of the fabrication imperfection is improved nine-fold and the quadrature error due to fabrication defect is reduced by 70 percent with a polygonal cross-section. It could be a better candidate for BFVG’s oblique beam, which would provide a gyroscope with good robustness and repeatability. |
format | Online Article Text |
id | pubmed-6187702 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2018 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-61877022018-11-01 Analysis and Design of a Polygonal Oblique Beam for the Butterfly Vibratory Gyroscope with Improved Robustness to Fabrication Imperfections Ou, Fenlan Hou, Zhanqiang Wu, Xuezhong Xiao, Dingbang Micromachines (Basel) Article This paper focuses on structural optimization of a Butterfly vibratory gyroscope (BFVG). An oblique suspension beam adopting polygonal cross-section is proposed in order to enhance the sensitivity and robustness. The operation principles of the BFVG are introduced. The suspension beam, which was found to be the key component, is selectively stressed. Varying cross sections of the suspension beam, including parallelogram, pentagon, hexagon, platform of pentagon, L-shaped and convex shapes are compared with each other. In particular, in order to show the advantages of the proposed polygonal cross-section, the convex cross-section is used as a reference. The influence of fabrication imperfections, which includes alignment error, silicon thickness error, etching depth error, upper width error, bottom width error and deep reactive-ion etching (DRIE) verticality error, on the oblique beam’s spindle azimuth angle of the two cross-sections is analyzed. Further, the quadrature error of two cross-sections with a fabrication defect is analyzed. The theoretical arithmetic results suggest that a polygonal cross-section beam is much more stable than a convex cross-section beam in most cases. The robustness of the fabrication imperfection is improved nine-fold and the quadrature error due to fabrication defect is reduced by 70 percent with a polygonal cross-section. It could be a better candidate for BFVG’s oblique beam, which would provide a gyroscope with good robustness and repeatability. MDPI 2018-04-24 /pmc/articles/PMC6187702/ /pubmed/30424131 http://dx.doi.org/10.3390/mi9050198 Text en © 2018 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Ou, Fenlan Hou, Zhanqiang Wu, Xuezhong Xiao, Dingbang Analysis and Design of a Polygonal Oblique Beam for the Butterfly Vibratory Gyroscope with Improved Robustness to Fabrication Imperfections |
title | Analysis and Design of a Polygonal Oblique Beam for the Butterfly Vibratory Gyroscope with Improved Robustness to Fabrication Imperfections |
title_full | Analysis and Design of a Polygonal Oblique Beam for the Butterfly Vibratory Gyroscope with Improved Robustness to Fabrication Imperfections |
title_fullStr | Analysis and Design of a Polygonal Oblique Beam for the Butterfly Vibratory Gyroscope with Improved Robustness to Fabrication Imperfections |
title_full_unstemmed | Analysis and Design of a Polygonal Oblique Beam for the Butterfly Vibratory Gyroscope with Improved Robustness to Fabrication Imperfections |
title_short | Analysis and Design of a Polygonal Oblique Beam for the Butterfly Vibratory Gyroscope with Improved Robustness to Fabrication Imperfections |
title_sort | analysis and design of a polygonal oblique beam for the butterfly vibratory gyroscope with improved robustness to fabrication imperfections |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187702/ https://www.ncbi.nlm.nih.gov/pubmed/30424131 http://dx.doi.org/10.3390/mi9050198 |
work_keys_str_mv | AT oufenlan analysisanddesignofapolygonalobliquebeamforthebutterflyvibratorygyroscopewithimprovedrobustnesstofabricationimperfections AT houzhanqiang analysisanddesignofapolygonalobliquebeamforthebutterflyvibratorygyroscopewithimprovedrobustnesstofabricationimperfections AT wuxuezhong analysisanddesignofapolygonalobliquebeamforthebutterflyvibratorygyroscopewithimprovedrobustnesstofabricationimperfections AT xiaodingbang analysisanddesignofapolygonalobliquebeamforthebutterflyvibratorygyroscopewithimprovedrobustnesstofabricationimperfections |