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Vibration Identification of Folded-MEMS Comb Drive Resonators

Natural frequency and frequency response are two important indicators for the performances of resonant microelectromechanical systems (MEMS) devices. This paper analytically and numerically investigates the vibration identification of the primary resonance of one type of folded-MEMS comb drive reson...

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Detalles Bibliográficos
Autores principales:	Han, Jianxin, Li, Lei, Jin, Gang, Feng, Jingjing, Li, Baizhou, Jia, Haili, Ma, Wenkui
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2018
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187744/ https://www.ncbi.nlm.nih.gov/pubmed/30424314 http://dx.doi.org/10.3390/mi9080381

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