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Direct-coupled micro-magnetometer with Y-Ba-Cu-O nano-slit SQUID fabricated with a focused helium ion beam
Direct write patterning of high-transition temperature (high-T(C)) superconducting oxide thin films with a focused helium ion beam is a formidable approach for the scaling of high-T(C) circuit feature sizes down to the nanoscale. In this letter, we report using this technique to create a sensitive m...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
AIP Publishing LLC
2018
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6188902/ https://www.ncbi.nlm.nih.gov/pubmed/30364078 http://dx.doi.org/10.1063/1.5048776 |