Complete Procedure for Fabrication of a Fused Silica Ultrarapid Microfluidic Mixer Used in Biophysical Measurements

In this paper we present a method to fabricate a fused silica microfluidic device by employing low viscosity KMPR photoresists. The resulting device is a continuous-flow microfluidic mixer based on hydrodynamic focusing. The advantages of this new fabrication method compared to the traditional approach using a poly-silicon mask are simplification, and time and cost reduction, while still preserving the quality and the performance of the mixers. This process results in devices in which the focusing channel has an aspect ratio of 10:1. The newly-fabricated mixer is successfully used to observe the folding of the Pin1 WW domain at the microsecond time scale.