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Fabrication of Pneumatic Microvalve for Tall Microchannel Using Inclined Lithography
We used inclined lithography to fabricate a pneumatic microvalve for tall microchannels such as those used to convey large cells. The pneumatic microvalve consists of three layers. The upper layer is the actual liquid microchannel, which has a parallelogram-shaped cross section of width 500 μm, heig...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2016
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189707/ https://www.ncbi.nlm.nih.gov/pubmed/30404396 http://dx.doi.org/10.3390/mi7120224 |