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A Microfluidic-Based Fabry Pérot Gas Sensor

We developed a micro-gas detector based on a Fabry-Pérot (FP) cavity embedded in a microfluidic channel. The detector was fabricated in two steps: a silicon substrate was bonded to a glass slide curved with a micro-groove, forming a microfluidic FP cavity; then an optical fiber was inserted through...

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Detalles Bibliográficos
Autores principales: Tao, Jin, Zhang, Qiankun, Xiao, Yunfeng, Li, Xiaoying, Yao, Pei, Pang, Wei, Zhang, Hao, Duan, Xuexin, Zhang, Daihua, Liu, Jing
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189712/
https://www.ncbi.nlm.nih.gov/pubmed/30407409
http://dx.doi.org/10.3390/mi7030036
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author Tao, Jin
Zhang, Qiankun
Xiao, Yunfeng
Li, Xiaoying
Yao, Pei
Pang, Wei
Zhang, Hao
Duan, Xuexin
Zhang, Daihua
Liu, Jing
author_facet Tao, Jin
Zhang, Qiankun
Xiao, Yunfeng
Li, Xiaoying
Yao, Pei
Pang, Wei
Zhang, Hao
Duan, Xuexin
Zhang, Daihua
Liu, Jing
author_sort Tao, Jin
collection PubMed
description We developed a micro-gas detector based on a Fabry-Pérot (FP) cavity embedded in a microfluidic channel. The detector was fabricated in two steps: a silicon substrate was bonded to a glass slide curved with a micro-groove, forming a microfluidic FP cavity; then an optical fiber was inserted through a hole drilled at the center of the groove into the microfluidic FP cavity, forming an FP cavity. The light is partially reflected at the optical fiber endface and the silicon surface, respectively, generating an interference spectrum. The detection is implemented by monitoring the interference spectrum shift caused by the refractive index change of the FP cavity when a gas analyte passes through. This detection mechanism (1) enables detecting a wide range of analytes, including both organic and inorganic (inertia) gases, significantly enhancing its versatility; (2) does not disturb any gas flow so that it can collaborate with other detectors to improve sensing performances; and (3) ensures a fast sensing response for potential applications in gas chromatography systems. In the experiments, we used various gases to demonstrate the sensing capability of the detector and observed drastically different sensor responses. The estimated sensitivity of the detector is 812.5 nm/refractive index unit (RIU) with a detection limit of 1.2 × 10(−6) RIU assuming a 1 pm minimum resolvable wavelength shift.
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spelling pubmed-61897122018-11-01 A Microfluidic-Based Fabry Pérot Gas Sensor Tao, Jin Zhang, Qiankun Xiao, Yunfeng Li, Xiaoying Yao, Pei Pang, Wei Zhang, Hao Duan, Xuexin Zhang, Daihua Liu, Jing Micromachines (Basel) Article We developed a micro-gas detector based on a Fabry-Pérot (FP) cavity embedded in a microfluidic channel. The detector was fabricated in two steps: a silicon substrate was bonded to a glass slide curved with a micro-groove, forming a microfluidic FP cavity; then an optical fiber was inserted through a hole drilled at the center of the groove into the microfluidic FP cavity, forming an FP cavity. The light is partially reflected at the optical fiber endface and the silicon surface, respectively, generating an interference spectrum. The detection is implemented by monitoring the interference spectrum shift caused by the refractive index change of the FP cavity when a gas analyte passes through. This detection mechanism (1) enables detecting a wide range of analytes, including both organic and inorganic (inertia) gases, significantly enhancing its versatility; (2) does not disturb any gas flow so that it can collaborate with other detectors to improve sensing performances; and (3) ensures a fast sensing response for potential applications in gas chromatography systems. In the experiments, we used various gases to demonstrate the sensing capability of the detector and observed drastically different sensor responses. The estimated sensitivity of the detector is 812.5 nm/refractive index unit (RIU) with a detection limit of 1.2 × 10(−6) RIU assuming a 1 pm minimum resolvable wavelength shift. MDPI 2016-02-25 /pmc/articles/PMC6189712/ /pubmed/30407409 http://dx.doi.org/10.3390/mi7030036 Text en © 2016 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons by Attribution (CC-BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Tao, Jin
Zhang, Qiankun
Xiao, Yunfeng
Li, Xiaoying
Yao, Pei
Pang, Wei
Zhang, Hao
Duan, Xuexin
Zhang, Daihua
Liu, Jing
A Microfluidic-Based Fabry Pérot Gas Sensor
title A Microfluidic-Based Fabry Pérot Gas Sensor
title_full A Microfluidic-Based Fabry Pérot Gas Sensor
title_fullStr A Microfluidic-Based Fabry Pérot Gas Sensor
title_full_unstemmed A Microfluidic-Based Fabry Pérot Gas Sensor
title_short A Microfluidic-Based Fabry Pérot Gas Sensor
title_sort microfluidic-based fabry pérot gas sensor
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189712/
https://www.ncbi.nlm.nih.gov/pubmed/30407409
http://dx.doi.org/10.3390/mi7030036
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