A Microfluidic-Based Fabry Pérot Gas Sensor

We developed a micro-gas detector based on a Fabry-Pérot (FP) cavity embedded in a microfluidic channel. The detector was fabricated in two steps: a silicon substrate was bonded to a glass slide curved with a micro-groove, forming a microfluidic FP cavity; then an optical fiber was inserted through a hole drilled at the center of the groove into the microfluidic FP cavity, forming an FP cavity. The light is partially reflected at the optical fiber endface and the silicon surface, respectively, generating an interference spectrum. The detection is implemented by monitoring the interference spectrum shift caused by the refractive index change of the FP cavity when a gas analyte passes through. This detection mechanism (1) enables detecting a wide range of analytes, including both organic and inorganic (inertia) gases, significantly enhancing its versatility; (2) does not disturb any gas flow so that it can collaborate with other detectors to improve sensing performances; and (3) ensures a fast sensing response for potential applications in gas chromatography systems. In the experiments, we used various gases to demonstrate the sensing capability of the detector and observed drastically different sensor responses. The estimated sensitivity of the detector is 812.5 nm/refractive index unit (RIU) with a detection limit of 1.2 × 10(−6) RIU assuming a 1 pm minimum resolvable wavelength shift.