A Microfluidic-Based Fabry Pérot Gas Sensor

We developed a micro-gas detector based on a Fabry-Pérot (FP) cavity embedded in a microfluidic channel. The detector was fabricated in two steps: a silicon substrate was bonded to a glass slide curved with a micro-groove, forming a microfluidic FP cavity; then an optical fiber was inserted through...

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Detalles Bibliográficos
Autores principales: Tao, Jin, Zhang, Qiankun, Xiao, Yunfeng, Li, Xiaoying, Yao, Pei, Pang, Wei, Zhang, Hao, Duan, Xuexin, Zhang, Daihua, Liu, Jing
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189712/
https://www.ncbi.nlm.nih.gov/pubmed/30407409
http://dx.doi.org/10.3390/mi7030036

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189712/
https://www.ncbi.nlm.nih.gov/pubmed/30407409
http://dx.doi.org/10.3390/mi7030036

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