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A Microfluidic-Based Fabry Pérot Gas Sensor
We developed a micro-gas detector based on a Fabry-Pérot (FP) cavity embedded in a microfluidic channel. The detector was fabricated in two steps: a silicon substrate was bonded to a glass slide curved with a micro-groove, forming a microfluidic FP cavity; then an optical fiber was inserted through...
Autores principales: | Tao, Jin, Zhang, Qiankun, Xiao, Yunfeng, Li, Xiaoying, Yao, Pei, Pang, Wei, Zhang, Hao, Duan, Xuexin, Zhang, Daihua, Liu, Jing |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2016
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189712/ https://www.ncbi.nlm.nih.gov/pubmed/30407409 http://dx.doi.org/10.3390/mi7030036 |
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