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In-Plane Optical Beam Collimation Using a Three-Dimensional Curved MEMS Mirror †
The collimation of free-space light propagating in-plane with respect to the substrate is an important performance factor in optical microelectromechanical systems (MEMS). This is usually carried out by integrating micro lenses into the system, which increases the cost of fabrication/assembly in add...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2017
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189714/ http://dx.doi.org/10.3390/mi8050134 |