Cargando…
A New Analytical Model to Estimate the Voltage Value and Position of the Pull-In Limit of a MEMS Cantilever
In this study, a new analytical model is developed for an electrostatic Microelectromechanical System (MEMS) cantilever actuator to establish a relation between the displacement of its tip and the applied voltage. The proposed model defines the micro-cantilever as a rigid beam supported by a hinge a...
| Autores principales: | , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2016
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189718/ https://www.ncbi.nlm.nih.gov/pubmed/30407425 http://dx.doi.org/10.3390/mi7040053 |