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Design and Analysis of a New Tuning Fork Structure for Resonant Pressure Sensor
This paper presents a micromachined resonant pressure sensor. The sensor is designed to optimize the sensitivity and reduce the cross-talk between the driving electrodes and sensing electrodes. The relationship between the sensitivity of the sensor and the main design parameters is analyzed both the...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2016
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189765/ https://www.ncbi.nlm.nih.gov/pubmed/30404322 http://dx.doi.org/10.3390/mi7090148 |