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In-Situ Testing of the Thermal Diffusivity of Polysilicon Thin Films

This paper presents an intuitive yet effective in-situ thermal diffusivity testing structure and testing method. The structure consists of two doubly clamped beams with the same width and thickness but different lengths. When the electric current is applied through two terminals of one beam, the bea...

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Detalles Bibliográficos
Autores principales:	Gu, Yi-Fan, Zhou, Zai-Fa, Sun, Chao, Li, Wei-Hua, Huang, Qing-An
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2016
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189791/ https://www.ncbi.nlm.nih.gov/pubmed/30404348 http://dx.doi.org/10.3390/mi7100174

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