A Highly Sensitive Humidity Sensor Based on Ultrahigh-Frequency Microelectromechanical Resonator Coated with Nano-Assembled Polyelectrolyte Thin Films

We developed a highly sensitive humidity sensor based on the combination of ultrahigh-frequency film bulk acoustic resonator (FBAR) and nano-assembled polyelectrolyte (PET) thin films. The water molecule absorption efficiency was optimized by forming loosely-packed PET nanostructures. Then, the humi...

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Detalles Bibliográficos
Autores principales: Liu, Wenpeng, Qu, Hemi, Hu, Jizhou, Pang, Wei, Zhang, Hao, Duan, Xuexin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189836/
http://dx.doi.org/10.3390/mi8040116

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189836/
http://dx.doi.org/10.3390/mi8040116

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