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An Analytical Model for CMUTs with Square Multilayer Membranes Using the Ritz Method

Capacitive micromachined ultrasonic transducer (CMUT) multilayer membrane plays an important role in the performance metrics including the transmitting efficiency and the receiving sensitivity. However, there are few studies of the multilayer membranes. Some analytical models simplify the multilayer...

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Detalles Bibliográficos
Autores principales: Zhang, Wen, Zhang, Hui, Jin, Shijiu, Zeng, Zhoumo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189930/
https://www.ncbi.nlm.nih.gov/pubmed/30407428
http://dx.doi.org/10.3390/mi7040055