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Tunable Clamped–Guided Arch Resonators Using Electrostatically Induced Axial Loads

We present a simulation and experimental investigation of bi-directional tunable in-plane clamped–guided arch microbeam resonators. Tensile and compressive axial forces are generated from a bi-directional electrostatic actuator, which modulates the microbeam stiffness, and hence changes its natural...

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Autores principales: Alcheikh, Nouha, Ramini, Abdallah, Hafiz, Md Abdullah Al, Younis, Mohammad I.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189952/
http://dx.doi.org/10.3390/mi8010014
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author Alcheikh, Nouha
Ramini, Abdallah
Hafiz, Md Abdullah Al
Younis, Mohammad I.
author_facet Alcheikh, Nouha
Ramini, Abdallah
Hafiz, Md Abdullah Al
Younis, Mohammad I.
author_sort Alcheikh, Nouha
collection PubMed
description We present a simulation and experimental investigation of bi-directional tunable in-plane clamped–guided arch microbeam resonators. Tensile and compressive axial forces are generated from a bi-directional electrostatic actuator, which modulates the microbeam stiffness, and hence changes its natural frequency to lower or higher values from its as-fabricated value. Several devices of various anchor designs and geometries are fabricated. We found that for the fabricated shallow arches, the effect of the curvature of the arch is less important compared to the induced axial stress from the axial load. We have shown that the first mode resonance frequency can be increased up to twice its initial value. Additionally, the third mode resonance frequency can be increased up to 30% of its initial value. These results can be promising as a proof-of-concept for the realization of wide-range tunable microresonators. The experimental results have been compared to finite-element simulations, showing good agreement among them.
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spelling pubmed-61899522018-11-01 Tunable Clamped–Guided Arch Resonators Using Electrostatically Induced Axial Loads Alcheikh, Nouha Ramini, Abdallah Hafiz, Md Abdullah Al Younis, Mohammad I. Micromachines (Basel) Article We present a simulation and experimental investigation of bi-directional tunable in-plane clamped–guided arch microbeam resonators. Tensile and compressive axial forces are generated from a bi-directional electrostatic actuator, which modulates the microbeam stiffness, and hence changes its natural frequency to lower or higher values from its as-fabricated value. Several devices of various anchor designs and geometries are fabricated. We found that for the fabricated shallow arches, the effect of the curvature of the arch is less important compared to the induced axial stress from the axial load. We have shown that the first mode resonance frequency can be increased up to twice its initial value. Additionally, the third mode resonance frequency can be increased up to 30% of its initial value. These results can be promising as a proof-of-concept for the realization of wide-range tunable microresonators. The experimental results have been compared to finite-element simulations, showing good agreement among them. MDPI 2017-01-04 /pmc/articles/PMC6189952/ http://dx.doi.org/10.3390/mi8010014 Text en © 2017 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC-BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Alcheikh, Nouha
Ramini, Abdallah
Hafiz, Md Abdullah Al
Younis, Mohammad I.
Tunable Clamped–Guided Arch Resonators Using Electrostatically Induced Axial Loads
title Tunable Clamped–Guided Arch Resonators Using Electrostatically Induced Axial Loads
title_full Tunable Clamped–Guided Arch Resonators Using Electrostatically Induced Axial Loads
title_fullStr Tunable Clamped–Guided Arch Resonators Using Electrostatically Induced Axial Loads
title_full_unstemmed Tunable Clamped–Guided Arch Resonators Using Electrostatically Induced Axial Loads
title_short Tunable Clamped–Guided Arch Resonators Using Electrostatically Induced Axial Loads
title_sort tunable clamped–guided arch resonators using electrostatically induced axial loads
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189952/
http://dx.doi.org/10.3390/mi8010014
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