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Tunable Clamped–Guided Arch Resonators Using Electrostatically Induced Axial Loads

We present a simulation and experimental investigation of bi-directional tunable in-plane clamped–guided arch microbeam resonators. Tensile and compressive axial forces are generated from a bi-directional electrostatic actuator, which modulates the microbeam stiffness, and hence changes its natural...

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Detalles Bibliográficos
Autores principales:	Alcheikh, Nouha, Ramini, Abdallah, Hafiz, Md Abdullah Al, Younis, Mohammad I.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2017
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189952/ http://dx.doi.org/10.3390/mi8010014

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