In-Plane MEMS Shallow Arch Beam for Mechanical Memory

We demonstrate a memory device based on the nonlinear dynamics of an in-plane microelectromechanical systems (MEMS) clamped–clamped beam resonator, which is deliberately fabricated as a shallow arch. The arch beam is made of silicon, and is electrostatically actuated. The concept relies on the inher...

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Detalles Bibliográficos
Autores principales: Hafiz, Md Abdullah Al, Kosuru, Lakshmoji, Ramini, Abdallah, Chappanda, Karumbaiah N., Younis, Mohammad I.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189999/
https://www.ncbi.nlm.nih.gov/pubmed/30404364
http://dx.doi.org/10.3390/mi7100191

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189999/
https://www.ncbi.nlm.nih.gov/pubmed/30404364
http://dx.doi.org/10.3390/mi7100191

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