Cargando…

A Large-Size MEMS Scanning Mirror for Speckle Reduction Application †

Based on microelectronic mechanical system (MEMS) processing, a large-size 2-D scanning mirror (6.5 mm in diameter) driven by electromagnetic force was designed and implemented in this paper. We fabricated the micromirror with a silicon wafer and selectively electroplated Ni film on the back of the...

Descripción completa

Detalles Bibliográficos
Autores principales: Li, Fanya, Zhou, Peng, Wang, Tingting, He, Jiahui, Yu, Huijun, Shen, Wenjiang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190003/
http://dx.doi.org/10.3390/mi8050140