Nonlinear Dynamic Behavior of a Bi-Axial Torsional MEMS Mirror with Sidewall Electrodes

Nonlinear dynamic responses of a Micro-Electro-Mechanical Systems (MEMS) mirror with sidewall electrodes are presented that are in close agreement with previously-reported experimental data. An analysis of frequency responses reveals softening behavior, and secondary resonances originated from the d...

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Detalles Bibliográficos
Autores principales: Ozdogan, Mehmet, Towfighian, Shahrzad
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190030/
https://www.ncbi.nlm.nih.gov/pubmed/30407422
http://dx.doi.org/10.3390/mi7030042

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190030/
https://www.ncbi.nlm.nih.gov/pubmed/30407422
http://dx.doi.org/10.3390/mi7030042

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