Fabrication of Micro-Optics Elements with Arbitrary Surface Profiles Based on One-Step Maskless Grayscale Lithography

A maskless lithography method to realize the rapid and cost-effective fabrication of micro-optics elements with arbitrary surface profiles is reported. A digital micro-mirror device (DMD) is applied to flexibly modulate that the exposure dose according to the surface profile of the structure to be f...

Descripción completa

Detalles Bibliográficos
Autores principales: Deng, Qinyuan, Yang, Yong, Gao, Hongtao, Zhou, Yi, He, Yu, Hu, Song
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190032/
https://www.ncbi.nlm.nih.gov/pubmed/30400504
http://dx.doi.org/10.3390/mi8100314

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190032/
https://www.ncbi.nlm.nih.gov/pubmed/30400504
http://dx.doi.org/10.3390/mi8100314

Ejemplares similares