Design and Fabrication of a 2-Axis Electrothermal MEMS Micro-Scanner for Optical Coherence Tomography †

This paper introduces an optical 2-axis Micro Electro-Mechanical System (MEMS) micromirror actuated by a pair of electrothermal actuators and a set of passive torsion bars. The actuated element is a dual-reflective circular mirror plate of 1 [Formula: see text] in diameter. This inner mirror plate i...

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Detalles Bibliográficos
Autores principales: Tanguy, Quentin A. A., Bargiel, Sylwester, Xie, Huikai, Passilly, Nicolas, Barthès, Magali, Gaiffe, Olivier, Rutkowski, Jaroslaw, Lutz, Philippe, Gorecki, Christophe
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190035/
http://dx.doi.org/10.3390/mi8050146

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