Characterizing the Deformation of the Polydimethylsiloxane (PDMS) Membrane for Microfluidic System through Image Processing †

Polydimethylsiloxane (PDMS) membranes have been widely used in the microfluidic community to achieve various functions such as control, sensing, filter, etc. In this paper, an experimental process was proposed to directly characterize the deformation of the on-chip PDMS membrane at large deformation based on the image processing method. High precision pressures were applied on the surface of the PDMS membrane with fixed edges and a series deformation of the PDMS membrane were captured by the imaging system. The Chan and Vese (CV) level set method was applied to segment the images of the deformed membrane. The volumes wrapped by the deformed membranes were obtained, and pressure-volumes relationships of the PDMS membranes with different geometry parameters were also calculated. Then the membrane capacitance can be derived by differentiating the curve of pressure-volumes. In addition, the theoretical estimation of the capacitance of the PDMS membrane at large deformation was also obtained through finite element simulation (FEM), which was in good agreement with the experimental results. These results are expected to be significant for designing and on-chip measuring of such PDMS membrane based microfluidic components in our future work.