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Design and Fabrication of a Slanted-Beam MEMS Accelerometer

This paper presents a novel capacitive microelectromechanical systems (MEMS) accelerometer with slanted supporting beams and all-silicon sandwich structure. Its sensing mechanism is quite similar to an ordinary sandwich-type MEMS accelerometer, except that its proof mass is suspended by a beam paral...

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Detalles Bibliográficos
Autores principales:	Xu, Wei, Yang, Jie, Xie, Guofen, Wang, Bin, Qu, Mingshan, Wang, Xuguang, Liu, Xianxue, Tang, Bin
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2017
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190107/ http://dx.doi.org/10.3390/mi8030077

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