Fabrication and Measurement of a Suspended Nanochannel Microbridge Resonator Monolithically Integrated with CMOS Readout Circuitry

We present the fabrication and characterization of a suspended microbridge resonator with an embedded nanochannel. The suspended microbridge resonator is electrostatically actuated, capacitively sensed, and monolithically integrated with complementary metal-oxide-semiconductor (CMOS) readout circuit...

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Detalles Bibliográficos
Autores principales: Vidal-Álvarez, Gabriel, Marigó, Eloi, Torres, Francesc, Barniol, Núria
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190125/
https://www.ncbi.nlm.nih.gov/pubmed/30407413
http://dx.doi.org/10.3390/mi7030040
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author Vidal-Álvarez, Gabriel
Marigó, Eloi
Torres, Francesc
Barniol, Núria
author_facet Vidal-Álvarez, Gabriel
Marigó, Eloi
Torres, Francesc
Barniol, Núria
author_sort Vidal-Álvarez, Gabriel
collection PubMed
description We present the fabrication and characterization of a suspended microbridge resonator with an embedded nanochannel. The suspended microbridge resonator is electrostatically actuated, capacitively sensed, and monolithically integrated with complementary metal-oxide-semiconductor (CMOS) readout circuitry. The device is fabricated using the back end of line (BEOL) layers of the AMS 0.35 μm commercial CMOS technology, interconnecting two metal layers with a contact layer. The fabricated device has a 6 fL capacity and has one of the smallest embedded channels so far. It is able to attain a mass sensitivity of 25 ag/Hz using a fully integrable electrical transduction.
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spelling pubmed-61901252018-11-01 Fabrication and Measurement of a Suspended Nanochannel Microbridge Resonator Monolithically Integrated with CMOS Readout Circuitry Vidal-Álvarez, Gabriel Marigó, Eloi Torres, Francesc Barniol, Núria Micromachines (Basel) Article We present the fabrication and characterization of a suspended microbridge resonator with an embedded nanochannel. The suspended microbridge resonator is electrostatically actuated, capacitively sensed, and monolithically integrated with complementary metal-oxide-semiconductor (CMOS) readout circuitry. The device is fabricated using the back end of line (BEOL) layers of the AMS 0.35 μm commercial CMOS technology, interconnecting two metal layers with a contact layer. The fabricated device has a 6 fL capacity and has one of the smallest embedded channels so far. It is able to attain a mass sensitivity of 25 ag/Hz using a fully integrable electrical transduction. MDPI 2016-03-02 /pmc/articles/PMC6190125/ /pubmed/30407413 http://dx.doi.org/10.3390/mi7030040 Text en © 2016 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons by Attribution (CC-BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Vidal-Álvarez, Gabriel
Marigó, Eloi
Torres, Francesc
Barniol, Núria
Fabrication and Measurement of a Suspended Nanochannel Microbridge Resonator Monolithically Integrated with CMOS Readout Circuitry
title Fabrication and Measurement of a Suspended Nanochannel Microbridge Resonator Monolithically Integrated with CMOS Readout Circuitry
title_full Fabrication and Measurement of a Suspended Nanochannel Microbridge Resonator Monolithically Integrated with CMOS Readout Circuitry
title_fullStr Fabrication and Measurement of a Suspended Nanochannel Microbridge Resonator Monolithically Integrated with CMOS Readout Circuitry
title_full_unstemmed Fabrication and Measurement of a Suspended Nanochannel Microbridge Resonator Monolithically Integrated with CMOS Readout Circuitry
title_short Fabrication and Measurement of a Suspended Nanochannel Microbridge Resonator Monolithically Integrated with CMOS Readout Circuitry
title_sort fabrication and measurement of a suspended nanochannel microbridge resonator monolithically integrated with cmos readout circuitry
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190125/
https://www.ncbi.nlm.nih.gov/pubmed/30407413
http://dx.doi.org/10.3390/mi7030040
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AT torresfrancesc fabricationandmeasurementofasuspendednanochannelmicrobridgeresonatormonolithicallyintegratedwithcmosreadoutcircuitry
AT barniolnuria fabricationandmeasurementofasuspendednanochannelmicrobridgeresonatormonolithicallyintegratedwithcmosreadoutcircuitry

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