Fabrication and Measurement of a Suspended Nanochannel Microbridge Resonator Monolithically Integrated with CMOS Readout Circuitry

We present the fabrication and characterization of a suspended microbridge resonator with an embedded nanochannel. The suspended microbridge resonator is electrostatically actuated, capacitively sensed, and monolithically integrated with complementary metal-oxide-semiconductor (CMOS) readout circuit...

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Detalles Bibliográficos
Autores principales: Vidal-Álvarez, Gabriel, Marigó, Eloi, Torres, Francesc, Barniol, Núria
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190125/
https://www.ncbi.nlm.nih.gov/pubmed/30407413
http://dx.doi.org/10.3390/mi7030040

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190125/
https://www.ncbi.nlm.nih.gov/pubmed/30407413
http://dx.doi.org/10.3390/mi7030040

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