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Fabrication and Measurement of a Suspended Nanochannel Microbridge Resonator Monolithically Integrated with CMOS Readout Circuitry

We present the fabrication and characterization of a suspended microbridge resonator with an embedded nanochannel. The suspended microbridge resonator is electrostatically actuated, capacitively sensed, and monolithically integrated with complementary metal-oxide-semiconductor (CMOS) readout circuit...

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Detalles Bibliográficos
Autores principales:	Vidal-Álvarez, Gabriel, Marigó, Eloi, Torres, Francesc, Barniol, Núria
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2016
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190125/ https://www.ncbi.nlm.nih.gov/pubmed/30407413 http://dx.doi.org/10.3390/mi7030040

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