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Characteristics of Double Planar Micro-Inductor with Patterned NiFe Thin-Films for DC/DC Integration

This paper proposes a double-planar-coil microinductor with patterned permalloy magnetic film for high frequency DC–DC integration. The effects of magnetic film’s patterning and thickness on the inductance and quality factor of the micro-inductor are investigated by using COMSOL Multiphysics softwar...

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Detalles Bibliográficos
Autores principales:	Chen, Mingming, Ding, Guifu, Cheng, Ping, Zhang, Congchun, Zhu, Xiaomin, Liu, Zhe
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2017
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190128/ http://dx.doi.org/10.3390/mi8050151

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