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Design and Analysis of MEMS Linear Phased Array

A structure of micro-electro-mechanical system (MEMS) linear phased array based on “multi-cell” element is designed to increase radiation sound pressure of transducer working in bending vibration mode at high frequency. In order to more accurately predict the resonant frequency of an element, the th...

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Detalles Bibliográficos
Autores principales:	Fan, Guoxiang, Li, Junhong, Wang, Chenghao
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2016
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190136/ https://www.ncbi.nlm.nih.gov/pubmed/30407382 http://dx.doi.org/10.3390/mi7010008

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