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Laser-Induced-Plasma-Assisted Ablation and Metallization on C-Plane Single Crystal Sapphire (c-Al(2)O(3))

Laser-induced-plasma-assisted ablation (LIPAA) is a promising micro-machining method that can fabricate microstructure on hard and transparent double-polished single crystal sapphire (SCS). While ablating, a nanosecond pulse 1064 nm wavelength laser beam travels through the SCS substrate and bombard...

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Detalles Bibliográficos
Autores principales:	Lu, Xizhao, Jiang, Feng, Lei, Tingping, Zhou, Rui, Zhang, Chentao, Zheng, Gaofeng, Wen, Qiuling, Chen, Zhong
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2017
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190168/ https://www.ncbi.nlm.nih.gov/pubmed/30400490 http://dx.doi.org/10.3390/mi8100300

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