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A Miniature On-Chip Methane Sensor Based on an Ultra-Low Loss Waveguide and a Micro-Ring Resonator Filter

A miniature methane sensor composed of a long ultra-low loss waveguide and a micro-ring resonator filter is proposed with high sensitivity and good selectivity. This sensor takes advantage of the evanescent field to implement methane concentration detection at a near infrared band (1650 nm). In the...

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Detalles Bibliográficos
Autores principales: Qiao, Yingying, Tao, Jifang, Chen, Chia-Hung, Qiu, Jifang, Tian, Ye, Hong, Xiaobin, Wu, Jian
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190237/
http://dx.doi.org/10.3390/mi8050160
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author Qiao, Yingying
Tao, Jifang
Chen, Chia-Hung
Qiu, Jifang
Tian, Ye
Hong, Xiaobin
Wu, Jian
author_facet Qiao, Yingying
Tao, Jifang
Chen, Chia-Hung
Qiu, Jifang
Tian, Ye
Hong, Xiaobin
Wu, Jian
author_sort Qiao, Yingying
collection PubMed
description A miniature methane sensor composed of a long ultra-low loss waveguide and a micro-ring resonator filter is proposed with high sensitivity and good selectivity. This sensor takes advantage of the evanescent field to implement methane concentration detection at a near infrared band (1650 nm). In the sensor, two waveguides, a strip waveguide and a slot waveguide, are specially designed and discussed based on three common semiconductor materials, including silica, silicon nitride, and silicon. Through simulations and numerical calculations, we determine that for the strip waveguide, the optimal evanescent field ratio (EFR) is approximately 39.8%, while the resolution is 32.1 ppb using a 15-cm waveguide length. For the slot waveguide, the optimal EFR is approximately 61.6%, and the resolution is 20.8 ppb with a 15-cm waveguide length.
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spelling pubmed-61902372018-11-01 A Miniature On-Chip Methane Sensor Based on an Ultra-Low Loss Waveguide and a Micro-Ring Resonator Filter Qiao, Yingying Tao, Jifang Chen, Chia-Hung Qiu, Jifang Tian, Ye Hong, Xiaobin Wu, Jian Micromachines (Basel) Article A miniature methane sensor composed of a long ultra-low loss waveguide and a micro-ring resonator filter is proposed with high sensitivity and good selectivity. This sensor takes advantage of the evanescent field to implement methane concentration detection at a near infrared band (1650 nm). In the sensor, two waveguides, a strip waveguide and a slot waveguide, are specially designed and discussed based on three common semiconductor materials, including silica, silicon nitride, and silicon. Through simulations and numerical calculations, we determine that for the strip waveguide, the optimal evanescent field ratio (EFR) is approximately 39.8%, while the resolution is 32.1 ppb using a 15-cm waveguide length. For the slot waveguide, the optimal EFR is approximately 61.6%, and the resolution is 20.8 ppb with a 15-cm waveguide length. MDPI 2017-05-17 /pmc/articles/PMC6190237/ http://dx.doi.org/10.3390/mi8050160 Text en © 2017 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/ (https://creativecommons.org/licenses/by/4.0/) ).
spellingShingle Article
Qiao, Yingying
Tao, Jifang
Chen, Chia-Hung
Qiu, Jifang
Tian, Ye
Hong, Xiaobin
Wu, Jian
A Miniature On-Chip Methane Sensor Based on an Ultra-Low Loss Waveguide and a Micro-Ring Resonator Filter
title A Miniature On-Chip Methane Sensor Based on an Ultra-Low Loss Waveguide and a Micro-Ring Resonator Filter
title_full A Miniature On-Chip Methane Sensor Based on an Ultra-Low Loss Waveguide and a Micro-Ring Resonator Filter
title_fullStr A Miniature On-Chip Methane Sensor Based on an Ultra-Low Loss Waveguide and a Micro-Ring Resonator Filter
title_full_unstemmed A Miniature On-Chip Methane Sensor Based on an Ultra-Low Loss Waveguide and a Micro-Ring Resonator Filter
title_short A Miniature On-Chip Methane Sensor Based on an Ultra-Low Loss Waveguide and a Micro-Ring Resonator Filter
title_sort miniature on-chip methane sensor based on an ultra-low loss waveguide and a micro-ring resonator filter
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190237/
http://dx.doi.org/10.3390/mi8050160
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