Cargando…
A Miniature On-Chip Methane Sensor Based on an Ultra-Low Loss Waveguide and a Micro-Ring Resonator Filter
A miniature methane sensor composed of a long ultra-low loss waveguide and a micro-ring resonator filter is proposed with high sensitivity and good selectivity. This sensor takes advantage of the evanescent field to implement methane concentration detection at a near infrared band (1650 nm). In the...
Autores principales: | , , , , , , |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2017
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190237/ http://dx.doi.org/10.3390/mi8050160 |
_version_ | 1783363524497506304 |
---|---|
author | Qiao, Yingying Tao, Jifang Chen, Chia-Hung Qiu, Jifang Tian, Ye Hong, Xiaobin Wu, Jian |
author_facet | Qiao, Yingying Tao, Jifang Chen, Chia-Hung Qiu, Jifang Tian, Ye Hong, Xiaobin Wu, Jian |
author_sort | Qiao, Yingying |
collection | PubMed |
description | A miniature methane sensor composed of a long ultra-low loss waveguide and a micro-ring resonator filter is proposed with high sensitivity and good selectivity. This sensor takes advantage of the evanescent field to implement methane concentration detection at a near infrared band (1650 nm). In the sensor, two waveguides, a strip waveguide and a slot waveguide, are specially designed and discussed based on three common semiconductor materials, including silica, silicon nitride, and silicon. Through simulations and numerical calculations, we determine that for the strip waveguide, the optimal evanescent field ratio (EFR) is approximately 39.8%, while the resolution is 32.1 ppb using a 15-cm waveguide length. For the slot waveguide, the optimal EFR is approximately 61.6%, and the resolution is 20.8 ppb with a 15-cm waveguide length. |
format | Online Article Text |
id | pubmed-6190237 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2017 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-61902372018-11-01 A Miniature On-Chip Methane Sensor Based on an Ultra-Low Loss Waveguide and a Micro-Ring Resonator Filter Qiao, Yingying Tao, Jifang Chen, Chia-Hung Qiu, Jifang Tian, Ye Hong, Xiaobin Wu, Jian Micromachines (Basel) Article A miniature methane sensor composed of a long ultra-low loss waveguide and a micro-ring resonator filter is proposed with high sensitivity and good selectivity. This sensor takes advantage of the evanescent field to implement methane concentration detection at a near infrared band (1650 nm). In the sensor, two waveguides, a strip waveguide and a slot waveguide, are specially designed and discussed based on three common semiconductor materials, including silica, silicon nitride, and silicon. Through simulations and numerical calculations, we determine that for the strip waveguide, the optimal evanescent field ratio (EFR) is approximately 39.8%, while the resolution is 32.1 ppb using a 15-cm waveguide length. For the slot waveguide, the optimal EFR is approximately 61.6%, and the resolution is 20.8 ppb with a 15-cm waveguide length. MDPI 2017-05-17 /pmc/articles/PMC6190237/ http://dx.doi.org/10.3390/mi8050160 Text en © 2017 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/ (https://creativecommons.org/licenses/by/4.0/) ). |
spellingShingle | Article Qiao, Yingying Tao, Jifang Chen, Chia-Hung Qiu, Jifang Tian, Ye Hong, Xiaobin Wu, Jian A Miniature On-Chip Methane Sensor Based on an Ultra-Low Loss Waveguide and a Micro-Ring Resonator Filter |
title | A Miniature On-Chip Methane Sensor Based on an Ultra-Low Loss Waveguide and a Micro-Ring Resonator Filter |
title_full | A Miniature On-Chip Methane Sensor Based on an Ultra-Low Loss Waveguide and a Micro-Ring Resonator Filter |
title_fullStr | A Miniature On-Chip Methane Sensor Based on an Ultra-Low Loss Waveguide and a Micro-Ring Resonator Filter |
title_full_unstemmed | A Miniature On-Chip Methane Sensor Based on an Ultra-Low Loss Waveguide and a Micro-Ring Resonator Filter |
title_short | A Miniature On-Chip Methane Sensor Based on an Ultra-Low Loss Waveguide and a Micro-Ring Resonator Filter |
title_sort | miniature on-chip methane sensor based on an ultra-low loss waveguide and a micro-ring resonator filter |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190237/ http://dx.doi.org/10.3390/mi8050160 |
work_keys_str_mv | AT qiaoyingying aminiatureonchipmethanesensorbasedonanultralowlosswaveguideandamicroringresonatorfilter AT taojifang aminiatureonchipmethanesensorbasedonanultralowlosswaveguideandamicroringresonatorfilter AT chenchiahung aminiatureonchipmethanesensorbasedonanultralowlosswaveguideandamicroringresonatorfilter AT qiujifang aminiatureonchipmethanesensorbasedonanultralowlosswaveguideandamicroringresonatorfilter AT tianye aminiatureonchipmethanesensorbasedonanultralowlosswaveguideandamicroringresonatorfilter AT hongxiaobin aminiatureonchipmethanesensorbasedonanultralowlosswaveguideandamicroringresonatorfilter AT wujian aminiatureonchipmethanesensorbasedonanultralowlosswaveguideandamicroringresonatorfilter AT qiaoyingying miniatureonchipmethanesensorbasedonanultralowlosswaveguideandamicroringresonatorfilter AT taojifang miniatureonchipmethanesensorbasedonanultralowlosswaveguideandamicroringresonatorfilter AT chenchiahung miniatureonchipmethanesensorbasedonanultralowlosswaveguideandamicroringresonatorfilter AT qiujifang miniatureonchipmethanesensorbasedonanultralowlosswaveguideandamicroringresonatorfilter AT tianye miniatureonchipmethanesensorbasedonanultralowlosswaveguideandamicroringresonatorfilter AT hongxiaobin miniatureonchipmethanesensorbasedonanultralowlosswaveguideandamicroringresonatorfilter AT wujian miniatureonchipmethanesensorbasedonanultralowlosswaveguideandamicroringresonatorfilter |