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MEMS Gyroscopes Based on Acoustic Sagnac Effect (†)
This paper reports on the design, fabrication and preliminary test results of a novel microelectromechanical systems (MEMS) device—the acoustic gyroscope. The unique operating mechanism is based on the “acoustic version” of the Sagnac effect in fiber-optic gyros. The device measures the phase differ...
Autores principales: | Yu, Yuanyuan, Luo, Hao, Chen, Buyun, Tao, Jin, Feng, Zhihong, Zhang, Hao, Guo, Wenlan, Zhang, Daihua |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2016
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190257/ http://dx.doi.org/10.3390/mi8010002 |
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