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Novel Capacitive Sensing System Design of a Microelectromechanical Systems Accelerometer for Gravity Measurement Applications

This paper presents an in-plane sandwich nano-g microelectromechanical systems (MEMS) accelerometer. The proof-mass fabrication is based on silicon etching through technology using inductive coupled plasma (ICP) etching. The capacitive detection system, which employs the area-changing sensing method...

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Detalles Bibliográficos
Autores principales:	Li, Zhu, Wu, Wen Jie, Zheng, Pan Pan, Liu, Jin Quan, Fan, Ji, Tu, Liang Cheng
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2016
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190280/ https://www.ncbi.nlm.nih.gov/pubmed/30404340 http://dx.doi.org/10.3390/mi7090167

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