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Squeeze Film Air Damping in Tapping Mode Atomic Force Microscopy

In dynamic plowing lithography, the sample surface is indented using a vibrating tip in tapping mode atomic force microscopy. During writing, the gap between the cantilever and the sample surface is very small, usually on the order of micrometers. High vibration frequency and small distance induce s...

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Detalles Bibliográficos
Autores principales:	Zhao, Yang, Huang, Qiangxian, Zhang, Liansheng, Zhang, Yong, Cheng, Rongjun
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2017
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190285/ https://www.ncbi.nlm.nih.gov/pubmed/30400416 http://dx.doi.org/10.3390/mi8070226

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