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Micro-Hole Drilling on Glass Substrates—A Review

Glass micromachining is currently becoming essential for the fabrication of micro-devices, including micro- optical-electro-mechanical-systems (MOEMS), miniaturized total analysis systems (μTAS) and microfluidic devices for biosensing. Moreover, glass is radio frequency (RF) transparent, making it a...

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Detalles Bibliográficos
Autores principales:	Hof, Lucas A., Abou Ziki, Jana
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2017
Materias:	Review
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190316/ http://dx.doi.org/10.3390/mi8020053

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