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Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators

This article reviews mechanically-tunable photonic devices with on-chip integrated MEMS/NEMS actuators. With related reports mostly published within the last decade, this review focuses on the tuning mechanisms of various passive silicon photonic devices, including tunable waveguides, couplers, ring...

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Detalles Bibliográficos
Autores principales: Du, Han, Chau, Fook Siong, Zhou, Guangya
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190338/
https://www.ncbi.nlm.nih.gov/pubmed/30407442
http://dx.doi.org/10.3390/mi7040069
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author Du, Han
Chau, Fook Siong
Zhou, Guangya
author_facet Du, Han
Chau, Fook Siong
Zhou, Guangya
author_sort Du, Han
collection PubMed
description This article reviews mechanically-tunable photonic devices with on-chip integrated MEMS/NEMS actuators. With related reports mostly published within the last decade, this review focuses on the tuning mechanisms of various passive silicon photonic devices, including tunable waveguides, couplers, ring/disk resonators, and photonic crystal cavities, and their results are selectively elaborated upon and compared. Applications of the mechanisms are also discussed. Future development of mechanically-tunable photonics is considered and one possible approach is based on plasmonics, which can confine light energy in the nano-scale space. Optomechanics is another innovation, derived from the strong coupling of optical and mechanical degrees of freedom. State-of-the-art studies of mechanically-tunable plasmonics and on-chip optomechanics are also selectively reviewed.
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spelling pubmed-61903382018-11-01 Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators Du, Han Chau, Fook Siong Zhou, Guangya Micromachines (Basel) Review This article reviews mechanically-tunable photonic devices with on-chip integrated MEMS/NEMS actuators. With related reports mostly published within the last decade, this review focuses on the tuning mechanisms of various passive silicon photonic devices, including tunable waveguides, couplers, ring/disk resonators, and photonic crystal cavities, and their results are selectively elaborated upon and compared. Applications of the mechanisms are also discussed. Future development of mechanically-tunable photonics is considered and one possible approach is based on plasmonics, which can confine light energy in the nano-scale space. Optomechanics is another innovation, derived from the strong coupling of optical and mechanical degrees of freedom. State-of-the-art studies of mechanically-tunable plasmonics and on-chip optomechanics are also selectively reviewed. MDPI 2016-04-16 /pmc/articles/PMC6190338/ /pubmed/30407442 http://dx.doi.org/10.3390/mi7040069 Text en © 2016 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC-BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Review
Du, Han
Chau, Fook Siong
Zhou, Guangya
Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators
title Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators
title_full Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators
title_fullStr Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators
title_full_unstemmed Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators
title_short Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators
title_sort mechanically-tunable photonic devices with on-chip integrated mems/nems actuators
topic Review
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190338/
https://www.ncbi.nlm.nih.gov/pubmed/30407442
http://dx.doi.org/10.3390/mi7040069
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