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Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators
This article reviews mechanically-tunable photonic devices with on-chip integrated MEMS/NEMS actuators. With related reports mostly published within the last decade, this review focuses on the tuning mechanisms of various passive silicon photonic devices, including tunable waveguides, couplers, ring...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2016
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190338/ https://www.ncbi.nlm.nih.gov/pubmed/30407442 http://dx.doi.org/10.3390/mi7040069 |
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author | Du, Han Chau, Fook Siong Zhou, Guangya |
author_facet | Du, Han Chau, Fook Siong Zhou, Guangya |
author_sort | Du, Han |
collection | PubMed |
description | This article reviews mechanically-tunable photonic devices with on-chip integrated MEMS/NEMS actuators. With related reports mostly published within the last decade, this review focuses on the tuning mechanisms of various passive silicon photonic devices, including tunable waveguides, couplers, ring/disk resonators, and photonic crystal cavities, and their results are selectively elaborated upon and compared. Applications of the mechanisms are also discussed. Future development of mechanically-tunable photonics is considered and one possible approach is based on plasmonics, which can confine light energy in the nano-scale space. Optomechanics is another innovation, derived from the strong coupling of optical and mechanical degrees of freedom. State-of-the-art studies of mechanically-tunable plasmonics and on-chip optomechanics are also selectively reviewed. |
format | Online Article Text |
id | pubmed-6190338 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2016 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-61903382018-11-01 Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators Du, Han Chau, Fook Siong Zhou, Guangya Micromachines (Basel) Review This article reviews mechanically-tunable photonic devices with on-chip integrated MEMS/NEMS actuators. With related reports mostly published within the last decade, this review focuses on the tuning mechanisms of various passive silicon photonic devices, including tunable waveguides, couplers, ring/disk resonators, and photonic crystal cavities, and their results are selectively elaborated upon and compared. Applications of the mechanisms are also discussed. Future development of mechanically-tunable photonics is considered and one possible approach is based on plasmonics, which can confine light energy in the nano-scale space. Optomechanics is another innovation, derived from the strong coupling of optical and mechanical degrees of freedom. State-of-the-art studies of mechanically-tunable plasmonics and on-chip optomechanics are also selectively reviewed. MDPI 2016-04-16 /pmc/articles/PMC6190338/ /pubmed/30407442 http://dx.doi.org/10.3390/mi7040069 Text en © 2016 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC-BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Review Du, Han Chau, Fook Siong Zhou, Guangya Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators |
title | Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators |
title_full | Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators |
title_fullStr | Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators |
title_full_unstemmed | Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators |
title_short | Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators |
title_sort | mechanically-tunable photonic devices with on-chip integrated mems/nems actuators |
topic | Review |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190338/ https://www.ncbi.nlm.nih.gov/pubmed/30407442 http://dx.doi.org/10.3390/mi7040069 |
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