Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators

This article reviews mechanically-tunable photonic devices with on-chip integrated MEMS/NEMS actuators. With related reports mostly published within the last decade, this review focuses on the tuning mechanisms of various passive silicon photonic devices, including tunable waveguides, couplers, ring...

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Detalles Bibliográficos
Autores principales: Du, Han, Chau, Fook Siong, Zhou, Guangya
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190338/
https://www.ncbi.nlm.nih.gov/pubmed/30407442
http://dx.doi.org/10.3390/mi7040069

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190338/
https://www.ncbi.nlm.nih.gov/pubmed/30407442
http://dx.doi.org/10.3390/mi7040069

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