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Z-Axis Micromachined Tuning Fork Gyroscope with Low Air Damping

This paper reports on the design and fabrication of a z-axis tuning fork gyroscope which has a freestanding architecture. In order to improve the performance of the tuning fork gyroscope by eliminating the influence of the squeeze-film air damping, the driving and sensing parts of the gyroscope were...

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Detalles Bibliográficos
Autores principales:	Nguyen, Minh Ngoc, Ha, Nhat Sinh, Nguyen, Long Quang, Chu, Hoang Manh, Vu, Hung Ngoc
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2017
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190345/ http://dx.doi.org/10.3390/mi8020042

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