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Devices Based on Co-Integrated MEMS Actuators and Optical Waveguide: A Review
The convergence of Micro Electro Mechanical Systems (MEMS) and optics was, at the end of the last century, a fertile ground for a new breed of technological and scientific achievements. The weightlessness of light has been identified very early as a key advantage for micro-actuator application, givi...
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2016
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190383/ https://www.ncbi.nlm.nih.gov/pubmed/30407390 http://dx.doi.org/10.3390/mi7020018 |