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Devices Based on Co-Integrated MEMS Actuators and Optical Waveguide: A Review

The convergence of Micro Electro Mechanical Systems (MEMS) and optics was, at the end of the last century, a fertile ground for a new breed of technological and scientific achievements. The weightlessness of light has been identified very early as a key advantage for micro-actuator application, givi...

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Detalles Bibliográficos
Autor principal: Chollet, Franck
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190383/
https://www.ncbi.nlm.nih.gov/pubmed/30407390
http://dx.doi.org/10.3390/mi7020018

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