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AlN-Based Ceramic Patch Antenna-Type Wireless Passive High-Temperature Sensor

An aluminum nitride (AlN) based patch antenna-type high-temperature wireless passive sensor is reported to operate as both a sensor and an antenna, which integrates in situ measurement/sensing with remote wireless communication at the same time. The sensor is small, easy to manufacture, highly sensi...

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Detalles Bibliográficos
Autores principales: Yan, Dan, Yang, Yong, Hong, Yingping, Liang, Ting, Yao, Zong, Chen, Xiaoyong, Xiong, Jijun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190435/
https://www.ncbi.nlm.nih.gov/pubmed/30400491
http://dx.doi.org/10.3390/mi8100301
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author Yan, Dan
Yang, Yong
Hong, Yingping
Liang, Ting
Yao, Zong
Chen, Xiaoyong
Xiong, Jijun
author_facet Yan, Dan
Yang, Yong
Hong, Yingping
Liang, Ting
Yao, Zong
Chen, Xiaoyong
Xiong, Jijun
author_sort Yan, Dan
collection PubMed
description An aluminum nitride (AlN) based patch antenna-type high-temperature wireless passive sensor is reported to operate as both a sensor and an antenna, which integrates in situ measurement/sensing with remote wireless communication at the same time. The sensor is small, easy to manufacture, highly sensitive and has a high operating temperature; it can be used in high-temperature, chemically corrosive and other harsh environments. The sensing mechanism of the sensor, the dielectric constant of the AlN ceramic substrate, increases with rising temperature, which reduces the resonant frequency of the sensor. Thus, the temperature can be measured by detecting changes in the sensor’s resonant frequency. High-Frequency Simulation Structure (HFSS) software is used to determine the structure and size of the sensor, which is then fabricated using thick-film technology. The substrate of the sensor is AlN ceramic due to its outstanding thermal resistance at high temperature; and its conductors (the radiation patch and the ground under the substrate) are silver-palladium alloy sintered form silver–palladium paste. A vector network analyzer reveals that the sensor’s operating range extends to 700 °C. Furthermore, its resonant frequency decreases from 2.20 GHz to 2.13 GHz with increasing temperature from room temperature (25 °C) to 700 °C, with an absolute sensitivity of 104.77 KHz/°C. Our work verifies the feasibility of measuring high temperatures using AlN-based patch antenna wireless passive temperature sensors, and provides a new material and temperature sensitive structure for high-temperature measurement in harsh environments.
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spelling pubmed-61904352018-11-01 AlN-Based Ceramic Patch Antenna-Type Wireless Passive High-Temperature Sensor Yan, Dan Yang, Yong Hong, Yingping Liang, Ting Yao, Zong Chen, Xiaoyong Xiong, Jijun Micromachines (Basel) Article An aluminum nitride (AlN) based patch antenna-type high-temperature wireless passive sensor is reported to operate as both a sensor and an antenna, which integrates in situ measurement/sensing with remote wireless communication at the same time. The sensor is small, easy to manufacture, highly sensitive and has a high operating temperature; it can be used in high-temperature, chemically corrosive and other harsh environments. The sensing mechanism of the sensor, the dielectric constant of the AlN ceramic substrate, increases with rising temperature, which reduces the resonant frequency of the sensor. Thus, the temperature can be measured by detecting changes in the sensor’s resonant frequency. High-Frequency Simulation Structure (HFSS) software is used to determine the structure and size of the sensor, which is then fabricated using thick-film technology. The substrate of the sensor is AlN ceramic due to its outstanding thermal resistance at high temperature; and its conductors (the radiation patch and the ground under the substrate) are silver-palladium alloy sintered form silver–palladium paste. A vector network analyzer reveals that the sensor’s operating range extends to 700 °C. Furthermore, its resonant frequency decreases from 2.20 GHz to 2.13 GHz with increasing temperature from room temperature (25 °C) to 700 °C, with an absolute sensitivity of 104.77 KHz/°C. Our work verifies the feasibility of measuring high temperatures using AlN-based patch antenna wireless passive temperature sensors, and provides a new material and temperature sensitive structure for high-temperature measurement in harsh environments. MDPI 2017-10-10 /pmc/articles/PMC6190435/ /pubmed/30400491 http://dx.doi.org/10.3390/mi8100301 Text en © 2017 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Yan, Dan
Yang, Yong
Hong, Yingping
Liang, Ting
Yao, Zong
Chen, Xiaoyong
Xiong, Jijun
AlN-Based Ceramic Patch Antenna-Type Wireless Passive High-Temperature Sensor
title AlN-Based Ceramic Patch Antenna-Type Wireless Passive High-Temperature Sensor
title_full AlN-Based Ceramic Patch Antenna-Type Wireless Passive High-Temperature Sensor
title_fullStr AlN-Based Ceramic Patch Antenna-Type Wireless Passive High-Temperature Sensor
title_full_unstemmed AlN-Based Ceramic Patch Antenna-Type Wireless Passive High-Temperature Sensor
title_short AlN-Based Ceramic Patch Antenna-Type Wireless Passive High-Temperature Sensor
title_sort aln-based ceramic patch antenna-type wireless passive high-temperature sensor
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190435/
https://www.ncbi.nlm.nih.gov/pubmed/30400491
http://dx.doi.org/10.3390/mi8100301
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