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Analysis of the Dynamic Characteristics of a Micro-Piezoelectric Bimorph Beam Based on an Admittance Test
A piezoelectric bimorph beam, as an upgraded cantilever beam structure, can be used to detect gas content and build a micro-actuator, among other functions. Thus, this beam is widely applied to microelectromechanical systems (MEMS), transformers, and precision machinery. For example, when photoacous...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2017
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190481/ https://www.ncbi.nlm.nih.gov/pubmed/30400411 http://dx.doi.org/10.3390/mi8070220 |