Design and Characterisation of Titanium Nitride Subarrays of Kinetic Inductance Detectors for Passive Terahertz Imaging

We report on the investigation of titanium nitride (TiN) thin films deposited via atomic layer deposition (ALD) for microwave kinetic inductance detectors (MKID). Using our in-house ALD process, we have grown a sequence of TiN thin films (thickness 15, 30, 60 nm). The films have been characterised i...

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Autores principales: Morozov, Dmitry, Doyle, Simon M., Banerjee, Archan, Brien, Thomas L. R., Hemakumara, Dilini, Thayne, Iain G., Wood, Ken, Hadfield, Robert H.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190646/
https://www.ncbi.nlm.nih.gov/pubmed/30839694
http://dx.doi.org/10.1007/s10909-018-2023-z
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author Morozov, Dmitry
Doyle, Simon M.
Banerjee, Archan
Brien, Thomas L. R.
Hemakumara, Dilini
Thayne, Iain G.
Wood, Ken
Hadfield, Robert H.
author_facet Morozov, Dmitry
Doyle, Simon M.
Banerjee, Archan
Brien, Thomas L. R.
Hemakumara, Dilini
Thayne, Iain G.
Wood, Ken
Hadfield, Robert H.
author_sort Morozov, Dmitry
collection PubMed
description We report on the investigation of titanium nitride (TiN) thin films deposited via atomic layer deposition (ALD) for microwave kinetic inductance detectors (MKID). Using our in-house ALD process, we have grown a sequence of TiN thin films (thickness 15, 30, 60 nm). The films have been characterised in terms of superconducting transition temperature [Formula: see text] , sheet resistance [Formula: see text] and microstructure. We have fabricated test resonator structures and characterised them at a temperature of 300 mK. At 350 GHz, we report an optical noise equivalent power [Formula: see text] , which is promising for passive terahertz imaging applications.
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spelling pubmed-61906462018-10-31 Design and Characterisation of Titanium Nitride Subarrays of Kinetic Inductance Detectors for Passive Terahertz Imaging Morozov, Dmitry Doyle, Simon M. Banerjee, Archan Brien, Thomas L. R. Hemakumara, Dilini Thayne, Iain G. Wood, Ken Hadfield, Robert H. J Low Temp Phys Article We report on the investigation of titanium nitride (TiN) thin films deposited via atomic layer deposition (ALD) for microwave kinetic inductance detectors (MKID). Using our in-house ALD process, we have grown a sequence of TiN thin films (thickness 15, 30, 60 nm). The films have been characterised in terms of superconducting transition temperature [Formula: see text] , sheet resistance [Formula: see text] and microstructure. We have fabricated test resonator structures and characterised them at a temperature of 300 mK. At 350 GHz, we report an optical noise equivalent power [Formula: see text] , which is promising for passive terahertz imaging applications. Springer US 2018-07-18 2018 /pmc/articles/PMC6190646/ /pubmed/30839694 http://dx.doi.org/10.1007/s10909-018-2023-z Text en © The Author(s) 2018 Open AccessThis article is distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution, and reproduction in any medium, provided you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made.
spellingShingle Article
Morozov, Dmitry
Doyle, Simon M.
Banerjee, Archan
Brien, Thomas L. R.
Hemakumara, Dilini
Thayne, Iain G.
Wood, Ken
Hadfield, Robert H.
Design and Characterisation of Titanium Nitride Subarrays of Kinetic Inductance Detectors for Passive Terahertz Imaging
title Design and Characterisation of Titanium Nitride Subarrays of Kinetic Inductance Detectors for Passive Terahertz Imaging
title_full Design and Characterisation of Titanium Nitride Subarrays of Kinetic Inductance Detectors for Passive Terahertz Imaging
title_fullStr Design and Characterisation of Titanium Nitride Subarrays of Kinetic Inductance Detectors for Passive Terahertz Imaging
title_full_unstemmed Design and Characterisation of Titanium Nitride Subarrays of Kinetic Inductance Detectors for Passive Terahertz Imaging
title_short Design and Characterisation of Titanium Nitride Subarrays of Kinetic Inductance Detectors for Passive Terahertz Imaging
title_sort design and characterisation of titanium nitride subarrays of kinetic inductance detectors for passive terahertz imaging
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190646/
https://www.ncbi.nlm.nih.gov/pubmed/30839694
http://dx.doi.org/10.1007/s10909-018-2023-z
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