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Study on Fabrication of ZnO Waveguide Layer for Love Wave Humidity Sensor Based on Magnetron Sputtering

The ZnO waveguide layer for the Love wave humidity sensor was fabricated by radio frequency (RF) magnetron sputtering technique using ZnO as the target material. To investigate the effect of RF magnetron sputtering temperature on the ZnO waveguide layer and Love wave device, a series of Love wave de...

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Detalles Bibliográficos
Autores principales:	Wen, Changbao, Niu, Taotao, Ma, Yue, Gao, Nan, Ru, Feng
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2018
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6210658/ https://www.ncbi.nlm.nih.gov/pubmed/30309017 http://dx.doi.org/10.3390/s18103384

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